The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film

► We prepare multilayer films of Ag/Si and Ag/SiNx by magnetron sputtering technique. ► We study the atomic oxygen (AO) resistance of Ag/Si film and Ag/SiNx. ► Nanoscaled Si or SiNx protective layer can provide better protection to Ag films against oxidation caused by AO irradiation. ► Ag/Si and Ag/SiNx films show the better lubricating performance before and after AO irradiation than pure Ag film.