Chemical mechanical polishing of stainless steel foil as flexible substrate

► Stainless steel foils are polished to be used as flexible substrates. ► The surface roughness can be reduced to 0.7 nm by chemical mechanical polishing. ► The acidic slurries containing oxidant can produce the greatest removal rate. ► The microscopic defects are always present within the polished surface. ► The electrochemical corrosion happens locally owing to manganese richness.