Fabrication and characterization of indium sulfide thin films deposited on SAMs modified substrates surfaces by chemical bath deposition

► In2S3 thin films were successfully deposited on the APTS layers modified ITO glass substrates using the chemical bath deposition technique. ► The detailed time-dependent evolutions of surface morphology, crystal phase and composition of In2S3 thin films were characterized. ► The correlations between the optical properties, photocurrent response and the thickness of thin films were established. ► Positive and negative micropatterned In2S3 thin films were successfully fabricated on modified Si substrates by combining CBD with UV lithography process.