Influence of temperature on structure as well as adhesion and friction and wear behavior of hydrogenated carbon nitride films prepared on silicon substrate

► Nanocrystalline CNx:H films are prepared via pyrolysis of ethylenediamine. ► Some N atoms incorporate into the crystal lattice of graphite to form CNx compound. ► Increasing temperature adds to formation of CN bond and improved wear resistance. ► Nanocrystal CNx:H film prepared at 900 °C has optimal friction and wear behavior.