Thermally oxidized aluminum as catalyst-support layer for vertically aligned single-walled carbon nanotube growth using ethanol

► Al-O films as catalyst-support layer in vertical SWCNT growth using ethanol CVD. ► Investigation of various Al-based catalyst-support layers. ► Thermally oxidized Al-O (400 °C, 10 min, static air) has the most appropriate surface properties for efficient VA-SWCNT growth. ► Surface roughness and surface chemical states of support layer are critical in determining CNT growth performance.