Surface properties of indium tin oxide treated by Cl2 inductively coupled plasma

- The work function of chlorinated ITO increases initially by up to 1 eV.
- The chlorinated ITO keeps an increment of work function of 0.3 eV after 100 days.
- The WF decrease curves can be fitted with double exponential functions.
- The desorption of unstable Cl in the surface leads to the rapid decrease of WF.
- The core levels of In 3d5 and Sn 3d5 and O 1s shift toward higher binding energies.