Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

- Two different a-C:H coatings in various thicknesses on Si (1 0 0) have been studied.
- For both types no significant difference in surface morphology is detectable.
- The grain number with respect to their height appears randomly distributed.
- In average no grain higher than 14 nm and larger than 0.05 μm2 was observed.
- A height to area correlation confines all detected grains to a limited region.