Hard Cr-Al-Si-B-(N) coatings deposited by reactive and non-reactive magnetron sputtering of CrAlSiB target

Structural changes and oxidation mechanism of the Cr-Al-Si-B-(N) coatings during annealing in air at temperatures up to 1300 °C were also studied in detail. It was revealed that the coating deposited in Ar showed the best oxidation resistance up to 1300 °C.