Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering

▶ The optical band gap of the films monotonically decreases with the increase of C2H2 flow rate. ▶ There is not Si-C bond in the surface of the SiCN film. ▶ The bonding structures in the surface of the SiCN film are different from those in the SiCN film. ▶ The SiCN films deposited by reactive magnetron sputtering have an even surface.