Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition

▶ TaC coating are deposited at 800 °C and 1200 °C with different TaCl5 pressure by chemical vapor deposition. ▶ Super-saturation is responsible for different coating morphology and texture structure. ▶ The growth mechanism of the texture coating is explained by the competitive growth model. ▶ A diffusion model of deposition species around step-edge-corner was proposed.