کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5358877 1388240 2011 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition
چکیده انگلیسی
▶ TaC coating are deposited at 800 °C and 1200 °C with different TaCl5 pressure by chemical vapor deposition. ▶ Super-saturation is responsible for different coating morphology and texture structure. ▶ The growth mechanism of the texture coating is explained by the competitive growth model. ▶ A diffusion model of deposition species around step-edge-corner was proposed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 257, Issue 9, 15 February 2011, Pages 4044-4050
نویسندگان
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