کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5359001 | 1503675 | 2014 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A novel ToF-SIMS operation mode for sub 100Â nm lateral resolution: Application and performance
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A novel ToF-SIMS operation mode for sub 100Â nm lateral resolution: Application and performance A novel ToF-SIMS operation mode for sub 100Â nm lateral resolution: Application and performance](/preview/png/5359001.png)
چکیده انگلیسی
A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100Â nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 289, 15 January 2014, Pages 407-416
Journal: Applied Surface Science - Volume 289, 15 January 2014, Pages 407-416
نویسندگان
Markus Kubicek, Gerald Holzlechner, Alexander K. Opitz, Silvia Larisegger, Herbert Hutter, Jürgen Fleig,