Boron doped ZnO thin films fabricated by RF-magnetron sputtering

▶ Both as-deposited and annealed ZnO:B films exhibit much lower resistivity as well as slightly broader optical band gap compared with pure ZnO film. ▶ These results are consistent with the first-principles calculations that in both ZnO:B films not only the band gap becomes narrower but also the Fermi level shifts up into the conduction band with respect to the pure ZnO film.