Effects of deposition temperatures and annealing conditions on the microstructural, electrical and optical properties of polycrystalline Al-doped ZnO thin films

▶ Rapid-thermal-annealing results in larger grains compared to furnace-annealing ▶ Rapid-thermal-annealed samples show low carrier concentrations and high mobilities ▶ Furnace-annealed samples produce higher carrier concentrations and moderate mobilities ▶ Optical bandgap of annealed samples increases with increasing carrier concentration