Spectroscopic characterization of β-FeSi2 single crystals and homoepitaxial β-FeSi2 films by XPS and XAS

▶ XPS and XAS analyses reveal the chemical states of β-FeSi2 single crystals and films. ▶ The thickness of surface oxide layers can be estimated by energy-tunable XPS. ▶ The annealing of β-FeSi2 single crystal at 1173 K induces the formation of FeSi. ▶ Homoepitaxial films can be grown on the β-FeSi2 single crystal by MBE.