کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5359374 1503677 2013 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Conductive aluminum line formation on aluminum nitride surface by infrared nanosecond laser
ترجمه فارسی عنوان
تشکیل آلومینیوم رسانای آلومینیوم بر روی سطح لیزر نانوذرات مادون قرمز
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
چکیده انگلیسی
In this paper the fabrication of conductive aluminum paths on AlN ceramic's surface due to the interaction of laser radiation Nd:YAG (1.064 μm) is presented. The metallization process produces an appropriate power value on the ceramics surface to ensure the correct temperature (2200 °C) for which aluminum and nitrogen bonds are broken. Studies have been undertaken on creating low-ohmic structures depending on the parameters such as radiation power, scanning speed, the coverage of subsequent pulses and the environmental impact of the process (air, nitrogen, argon). Furthermore, with regards to the application of this method, it was significant to determine the thickness of the functional layer. A structure of the resistivity of ρ = 0.64 × 10−6 Ω m and aluminum layer thickness of 10 μm was achieved for the process carried out on the inert gas, argon. In addition, a quantitative analysis of nitrogen and aluminum for laser-treated structures was conducted. The performed tests confirmed that the highest amount of aluminum was produced on the surface treated by laser radiation in the environment of the process gas, argon.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 287, 15 December 2013, Pages 165-171
نویسندگان
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