کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5359727 | 1503681 | 2013 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
High performance ZnO:Al films deposited on PET substrates using facing target sputtering
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
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چکیده انگلیسی
ZnO:Al (ZAO) thin films have been deposited on flexible PET substrates using a plasma damage-free facing target sputtering system at room temperature. The structure, surface morphology, electrical and optical properties were investigated as a function of working power. All the samples have a highly preferred orientation of the c-axis perpendicular to the PET substrate and have a high quality surface. With increased working power, the carrier concentration changes slightly, the mobility increases at the beginning and decreases after it reaches a maximum value, in line with electrical conductivity. The figure of merit has been significantly improved with increasing of the working power. Under the optimized condition, the lowest resistivity of 1.3 Ã 10â3 Ω cm with a sheet resistance of 29 Ω/â¡ and the relative visible transmittance above 93% in the visible region were obtained.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 282, 1 October 2013, Pages 467-471
Journal: Applied Surface Science - Volume 282, 1 October 2013, Pages 467-471
نویسندگان
Tingting Guo, Guobo Dong, Fangyuan Gao, Yu Xiao, Qiang Chen, Xungang Diao,