Wet etching of InSb surfaces in aqueous solutions: Controlled oxide formation

- An innovative study on the wet etching on Indium Antimony was performed in two different aqueous solutions.
- The morphology and the chemistry of the formed oxide are controlled.
- The importance of a correct fit of XPS spectra in 3d regions is highlighted.
- We show that different oxide can be obtained for identical etching rates depending on the chemistry of the aqueous solution.