کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5360132 1503687 2013 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optical characterization of deposited ITO thin films on glass and PET substrates
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Optical characterization of deposited ITO thin films on glass and PET substrates
چکیده انگلیسی
This work focuses on fabrication, characterization and understanding some physical properties of transparent and conductive ITO thin films. ITO thin films were deposited onto glass and polyethylene terephthalate (PET) substrates by thermionic vacuum arc (TVA) technique. TVA is a different technology for thin film deposition. Thicknesses and refractive indices of the ITO thin films have been determined by spectroscopic ellipsometry (SE) technique using Cauchy model for fitting. SE is a novel, nondestructive and powerful technique to investigate the optical characteristics of materials. Especially thickness and optical constants are measuring this device. Transmittances, reflectance of ITO coated samples were measured by UV-vis spectrophotometer and interferometer, respectively. The optical method was used to determine the band gaps of ITO thin films. Surface morphologies of produced films were characterized by atomic force microscope (AFM) for surface topography and roughness of ITO thin films. Resistivity measurements show that produced films show semiconductor properties.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 276, 1 July 2013, Pages 641-645
نویسندگان
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