Growth and characterization of lead-free piezoelectric BaZr0.2Ti0.8O3-Ba0.7Ca0.3TiO3 thin films on Si substrates

► Lead-free piezoelectric BCZT thin films were grown on Si by magnetron sputtering. ► The conduction mechanisms and local electromechanical properties were investigated. ► A considerably high effective piezoelectric coefficient of 94 ± 4 pm/V was observed.