Performance of Cr-doped ZnO for acetone sensing

► Zinc oxide (ZnO) thin films were doped with chromium (Cr) through reactive dual sputtering for gas sensing applications. ► The Cr concentrations were in the range of 1-4 at%, and were changed by controlling the sputtering power. ► The 1 at% Cr doped ZnO showed the highest response at operating temperature of 300 °C. ► The sensor shows repeatability and a linear response with the acetone concentrations at the range from 15 to 1000 ppm.