Correlation between ZnO nanorod growth and the dislocations in AlN-based substrates

► Selective growth of ZnO nanorods by controlling the dislocation density contained in AlN-based substrates was demonstrated. ► Correlation between ZnO nanorod growth and the dislocation density in the substrates was revealed. ► Alignment and average diameter of ZnO nanorods were found to be affected by dislocation etch pits exposed on the surface of AlN.