کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5360840 | 1388266 | 2009 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Low-pressure plasma cleaning of Au and PtIr noble metal surfaces
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Low-pressure plasma cleaning of Au and PtIr noble metal surfaces Low-pressure plasma cleaning of Au and PtIr noble metal surfaces](/preview/png/5360840.png)
چکیده انگلیسی
The effect of low-pressure hydrogen and oxygen plasma cleaning of Au and PtIr was investigated by X-ray photoelectron spectroscopy. Hydrocarbon contamination was efficiently removed by hydrogen and oxygen plasma. Hydrogen plasma additionally reduces oxygen compounds, especially metal oxides, while oxygen plasma results in the formation of a surface layer of Au2O3 and PtO, respectively. Both noble metal oxides are unstable and decompose with time. The decomposition of metal oxides occurs in parallel with the recontamination of the surface. Metal oxides can be removed completely for Au and partially for PtIr by an additional cleaning with hydrogen plasma. Hydrogen plasma treatment is very promising for noble metal surface cleaning.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 5, 15 December 2009, Pages 1382-1390
Journal: Applied Surface Science - Volume 256, Issue 5, 15 December 2009, Pages 1382-1390
نویسندگان
P. Fuchs,