کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5361185 1388270 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering at low temperature
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering at low temperature
چکیده انگلیسی
Ga-doped ZnO (ZnO:Ga) transparent conductive films were deposited on glass substrates by DC reactive magnetron sputtering. The structural, electrical, and optical properties of ZnO:Ga films were investigated in a wide temperature range from room temperature up to 400 °C. The crystallinity and surface morphology of the films are strongly dependent on the growth temperatures, which in turn exert an influence on the electrical and optical properties of the ZnO:Ga films. The film deposited at 350 °C exhibited the relatively well crystallinity and the lowest resistivity of 3.4 × 10−4 Ω cm. More importantly, the low-resistance and high-transmittance ZnO:Ga films were also obtained at a low temperature of 150 °C by changing the sputtering powers, having acceptable properties for application as transparent conductive electrodes in LCDs and solar cells.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 1, 15 October 2009, Pages 289-293
نویسندگان
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