Influence of deposition parameters on hard Cr-Al-N coatings deposited by multi-arc ion plating

► We prepared Cr-Al-N films at various deposition parameters by multi-arc ion plating. ► We examined the phase structures of Cr-Al-N films by XRD and XPS. ► We systematically evaluated macroparticles, hardness and adhesion strength of Cr-Al-N films.