کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5361520 | 1388274 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Wet chemical etching method for BST thin films annealed at high temperature
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Wet chemical etching method for BST thin films annealed at high temperature Wet chemical etching method for BST thin films annealed at high temperature](/preview/png/5361520.png)
چکیده انگلیسی
As a traditional etchant, pure buffered hydrofluoric acid (BHF), does not possess the ability to etch BST thin films annealed at high temperature, even though it works greatly on as-deposited Ba0.5Sr0.5TiO3 (BST) films. In this paper, we developed an etchant by mixing BHF and strong acid (HNO3, HCl, H2SO4 and H3PO4) and use it successfully on BST films annealed with high temperature. The experimental results show that a 1-8Â wt% of strong acid acts as an efficient catalyst and the etching speed is significantly improved. The etched BST films show little distortions and smooth etching edges were recorded.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 254, Issue 21, 30 August 2008, Pages 6697-6700
Journal: Applied Surface Science - Volume 254, Issue 21, 30 August 2008, Pages 6697-6700
نویسندگان
R.T. Zhang, C.R. Yang, A. Yu, B. Wang, H.J. Tang, H.W. Chen, J.H. Zhang,