کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5361608 | 1388275 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams](/preview/png/5361608.png)
چکیده انگلیسی
Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 255, Issue 24, 30 September 2009, Pages 9581-9584
Journal: Applied Surface Science - Volume 255, Issue 24, 30 September 2009, Pages 9581-9584
نویسندگان
Keiji Hayashi, Daisuke Tanaka, Harumi Araki, Tomoki Maruyama, Daisuke Matsumura, Kazuho Toyoda, Noriyuki Tsuji,