Effect of laser power on orientation and microstructure of Ba2TiO4 film prepared by laser chemical vapor deposition

► The single orthorhombic phase Ba2TiO4 films were prepared by laser CVD. ► With increasing laser power, the preferred orientation of Ba2TiO4 film changed. ► With increasing laser power, the microstructure of Ba2TiO4 film changed. ► Ba2TiO4 film prepared at 881 K had high deposition rate of 51.4 μm h−1.