Controllability study on the preparation of pure phase BiFeO3 thin films by liquid phase self-assembled method

► BiFeO3 thin films were prepared on OTS-SAMs by liquid phase self-assembled method. ► Changing the pH value of BFO precursor solutions will affect the phase purity. ► According to the Hard-Soft-Acid-Base principle, Bi3+ has larger deposition rate. ► Pure phase BiFeO3 thin films can be obtained under various pH values. ► Site-selectively deposited micropattern of BiFeO3 film has clear edges.