High-temperature pretreatment of Ni nanoparticles enhances the growth of high-density carbon fiber bundles during microwave plasma chemical vapor deposition

► We evaluated the pretreatment procedure of Ni nanoparticles (NPs) on the growth of multiwalled carbon nanotube (MWCNT) bundles by means of microwave plasma chemical vapor deposition (MPCVD). ► The diameter and shape of the Ni NPs were the dominant factors affecting the size and density of the MWCNT bundles. ► We obtained MWCNTs that fully filled the via effectively; they might serve as potential interconnects in future nanodevices.