The influences of the local impact site and incident energy on the transport behaviors of single copper atom onto Cu (0Â 0Â 1) surface

► Both the local impact site and incident energy could influence on transport behaviors of a single deposited Cu atom onto Cu (0 0 1). ► The observed transport behaviors of the deposited atom include: direct adsorption (DA), penetration by atomic exchange, and transient penetration (TP). ► The maximum increment of kinetic energy at every impact site approaches to a certain value except for the incident energy below 2.0 eV. ► Transport behaviors of the incident atoms are possibly attributed to the dynamical competition between the deposited atom and substrate atoms.