Effect of different annealing methods on ferroelectric properties of 0.95Pb(Sc0.5Ta0.5)O3-0.05PbTiO3 thin films

► The films were fabricated by radio frequency magnetron sputtering technique. ► A novel two-steps rapid thermal annealing approach was demonstrated. ► Microstructure plays an important role in enhanced ferroelectric properties. ► Two-steps rapid thermal annealing could be potential for ferroelectric films.