Synthesis and characterization of porous crystalline SiC thin films prepared by radio frequency reactive magnetron sputtering technique

► The effect of deposition temperature on structural and optical properties of one of the poly types that is rarely reported in literature i.e. 8H-SiC is represented in this article. ► The details of synthesis of SiC films by reactive magnetron sputtering technique are discussed. ► The structural and optical characterization is focused in detail.