A micro-spectroscopy study on the influence of chemical residues from nanofabrication on the nitridation chemistry of Al nanopatterns

► The Al nanopatterned surface was studied by a micro-spectroscopy combined photoemission electron microscopy. ► Fluorocarbons, e-beam exposed- and unexposed-polymethylmethacrylate (PMMA) residues from the nanofabrication were identified on the nanopatterns. ► The fluorocarbons influenced the chemical composition of the nanopatterns by forming AlF compounds before nitridation. ► In the PMMA residue-free area, the AlF compounds on the sidewalls were decomposed and transformed to AlN by nitridation. ► The PMMA residues between the individual nanopatterns were partially decomposed by nitridation.