Spatial variation of the number of graphene layers formed on the scratched 6H-SiC(0Â 0Â 0Â 1) surface

► We investigate the epitaxial graphene grown on SiC. ► Spatial variation of the number of graphene layers is measured by a low-energy electron microscope. ► The number of graphene layers is greater near scratched areas of SiC substrate. ► The thicker graphene areas can also extend significantly away from the edges of the scratch. ► This finding can be implemented as an additional technique for spatially modulating graphene thickness.