Formation of self-organized nanostructures on semi-insulating InP by 100Â keV Ar+-ion irradiation

► Nanostructure formation on InP surface at room temperature without substrate rotation by 100 keV argon ion. ► A large angular window (0-75°), in terms of ion incident angle, was studied. Dot formation in the angular window of 30-75°. ► RMS surface roughness, the dot size, and the dot height decreases with increasing angle of incidence. ► But dot density increases with increasing angle of incidence (for a particular fluence).