Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography

► Proton beam writing and UV lithography are used to expose AR-P 3250 resist. ► The processing conditions of AR-P 3250 resist have been optimized. ► Smooth and tall resist structures are demonstrated in AR-P 3250. ► These structures have been successfully transferred into high quality Ni moulds. ► Potential application can be found in nanoimprint lithography.