کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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5362504 | 1388288 | 2008 | 4 صفحه PDF | دانلود رایگان |
A multiparameter fitting with additional parameters for film inhomogeneity based on transmission results is used to get film inhomogeneity information and to compare different models for film structure. For a number of evaporated materials similar results from transmission fitting have been obtained by using a model consisting of two sublayers with a constant difference in refractive indices between them, either with a thin sublayer in the contact with a substrate or with air. As additional information, we obtained the film physical thickness result from step profile measurements for an oxygen-doped Y2O3 film on a fused silica and we compared it with the fit results for this coating. The result closest to the profilometry one has been achieved for a model with a thinner sublayer in contact with the substrate. The differences are great enough to assert that Y2O3 films on a fused silica possess a higher refractive index in the first stages of growth and then, after some transition, the main material with smaller refractive index grows on it.
Journal: Applied Surface Science - Volume 254, Issue 12, 15 April 2008, Pages 3677-3680