کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5362693 | 1388291 | 2010 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: A study of AFM-based scratch process on polycarbonate surface and grating application A study of AFM-based scratch process on polycarbonate surface and grating application](/preview/png/5362693.png)
We report on the possibility of applying atomic force microscope (AFM) lithography to draw micro/nano-structures on the surface of a polycarbonate (PC) substrate. We also fabricated a grating structure on the PC surface using the scratch method. An AFM silicon tip coated with a diamond layer was utilized as a cutting tool to scratch the surface of the sample. In order to obtain pattern depth deeper than the control method of interaction force, we used a scanner movement method which the sample scanner moves along the Z-axis. A grating of 100 μm Ã 150 μm was fabricated by the step and repeat method wherein the sample stage is moved in the direction of the XY-axis. The period and the depth of the grating are 500 and 50 nm, respectively. Light of 632.8 nm wavelength was diffracted on the surface of the PC substrate.
Journal: Applied Surface Science - Volume 256, Issue 24, 1 October 2010, Pages 7668-7671