Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing

► A detailed description of the fabrication process of the first-ever synchrotron hard X-ray Montel/nested elliptical KB mirror using a profile coating technique and flat Si substrates. ► Demonstrated excellent figure-precision of sub-nm rms height-error of profile-coated elliptical KB mirrors. ► Provided an economic solution of fabricating KB mirrors with a very precise elliptical surface profile at the small corner area of Montel optics for synchrotron hard X-rays.