Structural characterization of Ni and Ni/Ti ohmic contact on n-type 4H-SiC

► Structural characterization of Ni layer and Ni/Ti bilayer contacts on n-type 4H-SiC. ► Study of Ni-silicides and the redistribution of carbon, after annealing at 950 °C, in the Ni/SiC and the Ni/Ti/SiC contacts. ► Rutherford Backscattering Spectrometry (RBS) at Eα = 3.2 MeV. ► Nuclear reaction analysis (NRA) at Ed = 1 MeV. ► Scanning electron microscopy (SEM) and Energy Dispersive X-ray Spectrometry (EDS) techniques.