Synthesis and characterization of Parylene C/nanosilica composite film

► We prepare Parylene C composite film doped with modified nanosilica particles. ► The nanosilica particles in the film have uniform diameters and distribution. ► The composite exhibits excellent thermal stability and mechanical properties. ► The degradation temperature is about 100 °C higher than Parylene C film. ► The elastic limit is increased by 10 N.