Characterization of direct- and back-scribing laser patterning of SnO2:F for a-Si:H PV module fabrication

► Study of direct and induced laser removal of SnO2:F using UV and IR ns laser sources. ► P1 grooves with good morphologic and electric properties obtained with all methods. ► Raman and EDX characterization of the structural changes in the heat affected zones. ► UV laser irradiation through the substrate is proposed as the best scribing method.