Copper-induced crystallization of sputtered silicon on ZnO:Al substrate and the textured interface for light trapping

► Obtained well crystallized poly-Si by Cu-induced crystallization on AZO substrate. ► Poly-Si quality is improved by the introduction of O2 when preparing AZO substrate. ► 660 nm textured Si with 17.7% average reflectivity, only 45% of the flat Si film.