Molybdenum thin film deposited by in-line DC magnetron sputtering as a back contact for Cu(In,Ga)Se2 solar cells

► A large area Mo back contact for CIGS thin film solar cells was deposited using in-line DC sputtering system. ► In order to reduce its resistivity and improve the adhesion of Mo film with glass substrate, a bilayer Mo film was deposited. ► The first layer was formed at 12 mTorr for better adhesion and the second layer was formed at 3 mTorr for lower resistivity.