Near surface layer evolution in Zn+ ions implanted Si upon annealing treatments

► SIMS revealed a significant redistribution of Zn atoms after annealing. ► After thermal annealing at 800 °C nanoparticles on the sample surface were revealed. ► After 1000 °C annealing Zn atoms are revealed in the near-surface layer only. ► XRD confirms a presence of Zn containing phases after 700-900 °C annealing.