RF-PACVD of water repellent and protective HMDSO coatings on bell metal surfaces: Correlation between discharge parameters and film properties

► Hexamethyldisiloxane (HMDSO) coatings on bell metal using RF-PACVD technique. ► Investigations of the films properties as a function of DC self-bias voltage. ► Impinging ion energy affects water repellency and protective behavior of the films. ► Correlation between impinging ion energy and deposited HMDSO film properties. ► Efficient use of HMDSO films for surface protection of bell metal using RF-PACVD.