The transparence comparison of Ga- and Al-doped ZnO thin films

► Ga- and Al-doped ZnO thin films (GZO and AZO) were grown on quartz glass by pulsed laser deposition. ► The transmittance of GZO and AZO were varied in according with the change of crystallization quality respectively. ► The higher transmittance of GZO than AZO was not dominated by the doping impurity ions. ► GZO surfaces were smoother than that of AZO was due to Ga acting as the surfactant.