کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5363802 | 1388306 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography](/preview/png/5363802.png)
چکیده انگلیسی
We present a fabrication procedure that can form large-scale periodic silicon nanopillar arrays for 2D nanomold which determines the feature size of nanoimprint lithography, using modified nanosphere lithography. The size of silicon nanopillars can be easily controlled by an etching and oxidation process. The period and density of nanopillar arrays are determined by the initial diameter of polystyrene (PS) spheres. In our experiment, the smallest nanopillar has a full width half maximum (FWHM) of approximately 50Â nm, and the density of silicon pillar is â¼109/cm2. Using this approach, it is possible to fabricate 2D nanoimprint lithography mask with 50Â nm resolution.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 22, 15 September 2007, Pages 9035-9038
Journal: Applied Surface Science - Volume 253, Issue 22, 15 September 2007, Pages 9035-9038
نویسندگان
Wei Li, Ling Xu, Wei-Ming Zhao, Ping Sun, Xin-Fan Huang, Kun-Ji Chen,