کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5363838 | 1503697 | 2013 | 6 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Titanium interlayer to improve the adhesion of multilayer amorphous boron carbide coating on silicon substrate Titanium interlayer to improve the adhesion of multilayer amorphous boron carbide coating on silicon substrate](/preview/png/5363838.png)
Boron-based coatings can be very useful in neutrons detection application. Here, stable boron carbon (B-C) films in nanometer scale were deposited on silicon substrates with titanium interlayer by RF plasma magnetron sputtering. Ti interlayer is likely to decrease the internal stress at the substrate-film interface, thus smoothing the difference in lattice parameters between the growing film and substrate. The B-C/Ti/Si coatings were characterized using SEM, EDS, AFM and XRD. The enhancement in adhesion of the B-C film to the substrate was analyzed by a scratch tester measurements.
⺠Boron-based coatings can be very useful in neutrons detection application. ⺠B-based coatings with a multilayer structure do not present stress phenomena. ⺠Ti interlayer decreases the internal stress at the substrate-film interface, thus smoothing the difference in lattice parameters between the growing film and substrate.
Journal: Applied Surface Science - Volume 266, 1 February 2013, Pages 170-175