Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method

► An AFM-based nanomachining method is used to fabricate large scale nanochannels. ► Chip formation states and variations in the machined depth and width are studied. ► The machining parameters to obtain the required machined depth and Ra are given. ► A nanochannels array with 1 mm in length and 180 nm in depth is machined. ► A three dimensional ladder-type nanochannel is manufactured.